Discover Beckhoff's XPlanar system, the pioneering solution for wafer handling in the semiconductor industry. Utilizing contactless magnetic levitation, the system enables flexible and precise movements that enhance efficiency and safety in the production process. The XPlanar system reduces mechanical complexity and wear while offering improved process security.
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XPlanar | Planar motor system
Multi-mover 2D product movement with up to six degrees of freedom – floating, contactless, and intelligent.
Semiconductor industry
PC and EtherCAT-based automation for the semiconductor industry.