본사 대한민국
Beckhoff Automation Co., Ltd.

대륭테크노타운 3차 12층
가산디지털2로 115
08505 금천구, 서울특별시, 대한민국

+82 2 2107-3242
info-kr@beckhoff.com
www.beckhoff.com/ko-kr/

May 5, 2025

XPlanar: Innovative Wafer Handler

Discover Beckhoff's XPlanar system, the pioneering solution for wafer handling in the semiconductor industry. Utilizing contactless magnetic levitation, the system enables flexible and precise movements that enhance efficiency and safety in the production process. The XPlanar system reduces mechanical complexity and wear while offering improved process security.

More about this video

XPlanar | Planar motor system

XPlanar | Planar motor system

Multi-mover 2D product movement with up to six degrees of freedom – floating, contactless, and intelligent.

Halbleiterfertigung

Halbleiterfertigung

PC and EtherCAT-based automation for the semiconductor industry.